CART Facilities
Organic Light Emitting Diode Evaporator
A custom built, computer controlled, fully automated vacuum deposition research and development tool for OLED, photovoltaic cells, or similar thin film applications was purchased by CART in 2006.
This system is used for: device optimization, layer thickness studies, dopant concentration studies, material conformance evaluations, and encapsulation studies.
The system is fully automated to produce functional multi-layered devices from pre-programmed recipes, with no operator intervention. Motion of substrates, shadow masks, boat source selection and pump sequencing are computer controlled. Organic and cathode masks are automatically changed and presented to the substrates without operator interaction, or breaking vacuum. Substrate shutters open and close automatically, according to programmed deposition recipe.
Automated Deposition Control Includes:
• Sigma Instruments SQS-242 Rate/Thickness software:
- Programmable for automated layer thickness variant control.
- Programmable for automated constituent ratio variant control.
- 4 rate crystal monitor heads.
• Executable programming for independent fixture control.
• Co-deposition capability.
• Eight thermal evaporative sources:
- Two Sorensen DCS 12-250 power supplies.
- Computer controlled high current switch must automate distribution of the power supply outputs to the eight thermal source locations.
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Click here for information about Equipment Use and/or Training.
Click here for information about Equipment Rates.
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For more information about CART equipment, contact David Diercks at 940-369-8106 or drd0036@unt.edu
