CART Facilities
Scanning Auger Nanoprobe
A Model 670xi Scanning Auger Nanoprobe was purchased by CART from Physical Electronics in February of 2008.
The Model 670xi Scanning Auger has full analytical capability including secondary electron imaging, multiple Auger point, line and area analyses, Auger imaging, depth-compositional analysis, backscattered electron imaging and automated multi-location analysis.
The system uses a coaxial cylindrical mirror analyzer to minimize analytical shadowing and maximize sensitivity. The differentially pumped Schottky field emission electron gun provides high spatial resolution and an analysis energy range from 1-25keV. A 5 kV differentially pumped Argon ion gun with regulated leak valve is available for specimen cleaning and depth profiling.
Instrument Specifications
Source
- Schottky field emission electron gun
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Electron Gun Specifications
SEM line scan resolution
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| Measurement |
Beam spot size
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| 3kV / 1nA |
≤70nm |
| 5kV / 1nA |
≤50nm |
| 10kV / 1nA |
≤25nm |
| 10kV / 10nA |
≤45nm |
| 20kV / 1nA |
≤15nm
|
SEM Dark Space Resolution for gold on carbon @200kx ≤10 nm
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| SEM magnification on 1500LPI grid in x and y = 16.9±0.3 um |
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Hardware
- Vacuum Specifications (UVH) main chamber ≤ 5 x 10-10 Torr
- 5kV differentially pumped Argon ion gun
- Fully motorized computer driven five axis specimen stage
- Compucentric Zalar Rotation for depth profiles
- Sample parking attachment holds 6 samples
- MultiChannel detector system
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Cylindrical Mirror Analyzer (CMA)
- Signal to noise @ 10kV/10nA on copper ≥550:1
- Sensitivity @ 10kV / 10nA on copper ≥500 Kcps
- Elastic Peak resolution @1kV/ .5nA for Survey 950 – 1050 eV
- FWHM of elastic peak ≤ 0.6%
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Software
- PC- ACCESS
- PHI MultiPak™ advanced data manipulation software
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Click here for information about Equipment Use and/or Training.
Click here for information about Equipment Rates.
Click here to go to the Online Schedule.
For more information about CART equipment, contact David Diercks at 940-369-8106 or drd0036@unt.edu
